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Electrochemical Liquid Phase Epitaxy (ec-LPE): A New Methodology for the Synthesis of Crystalline Group IV Semiconductor Epifilms

zhpd55 添加于 2017/5/15 16:39:05  28次阅读 | 0次推荐 | 0个评论

Deposition of epitaxial germanium (Ge) thin films on silicon (Si) wafers has been achieved over large areas with aqueous feedstock solutions using electrochemical liquid phase epitaxy (ec-LPE) at low temperatures (T ≤ 90 °C). The ec-LPE method uniquely blends the simplicity and control of traditional electrodeposition with the material quality of melt growth. A new electrochemical cell design based on the compression of a liquid metal electrode into a thin cavity that enables ec-LPE is described. The epitaxial nature, low strain character, and crystallographic defect content of the resultant solid Ge films were analyzed by electron backscatter diffraction, scanning transmission electron microscopy, high resolution X-ray diffraction, and electron channeling contrast imaging. The results here show the first step toward a manufacturing infrastructure for traditional crystalline inorganic semiconductor epifilms that does not require high temperature, gaseous precursors, or complex apparatus.

作 者:Joshua Demuth, Eli Fahrenkrug, Luyao Ma, Titilayo Shodiya, Julia I. Deitz, Tyler J. Grassman , Stephen Maldonado
期刊名称: J. Am. Chem. Soc.
期卷页: Publication Date (Web): May 9, 2017 第卷 第期 页
学科领域:化学科学 » 无机化学 » 无机合成和制备化学
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原文链接:http://pubs.acs.org/doi/abs/10.1021/jacs.7b01968
DOI: 10.1021/jacs.7b01968
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备 注: University of Michigan chemists have developed a greener, cheaper way to make single-crystalline semiconductor films, components at the heart of all of our electric gadgetry. Single-crystalline films of inorganic semiconductors are the bedrock of nearly all electronics, including smartphones, computers and solar panels. The fastest integrated circuits feature transistors consisting of germanium films on silicon. But such materials are typically only prepared at elevated temperatures, with complex machinery that involve hazardous gases. The U-M team, led by Stephen Maldonado, an associate professor of chemistry, has invented a method to simultaneously synthesize and deposit crystalline semiconductor films from water at room temperatures using equipment that can be assembled for just a few dollars.
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