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Comprehensive characterization of Gd and Tb laser plasma emission near l = 6.7nm

xiongwen 添加于 2016/5/15 14:25:26  307次阅读 | 0次推荐 | 0个评论

Plasmas emitting near l = 6.7 nm are of interest for beyond extreme ultraviolet (BEUV) lithography. Highly ionized Gd and Tb plasmas can produce intense emission through unresolved transition arrays (UTA) at wavelengths around l = 6.7 nm, which fall in the spectral region of La/B- based multilayer mirrors which have high reflectivity at that wavelength. Several studies of laser-created Gd and Tb plasmas emitting near l = 6.7 nm have been reported for different laser parameters. However these measurements were conducted using different lasers and experimental setups. Here we report results of a comprehensive study of the spectral characteristics, conversion efficiency (CE) and source size of Gd and Tb plasmas created over a broad range of laser pulsewidths (220 ps to 4 ns)

作 者:Liang Yin, Hanchen Wang, Brendan Reagan
期刊名称: SPIE Advanced Lithography 2016, Conference 9776: Extreme Ultraviolet (EUV) Lithography VII
期卷页: Thursday 22–25 February 2016 第卷 第期 页
学科领域:信息科学 » 半导体科学与信息器件 » 半导体电子器件
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